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Growth kinetics and electrical properties of silicon dioxide films grown in an inductively coupled RF plasma anodization reactor (R)

by Choksi, Asheesh J [Author] | Chandorkar, Arun N [ Supervisor] | Indian Institute of Technology Bombay. Department of Electrical Engineering.

Language: English Publication details: Bombay IIT 1991Dissertation note: Thesis Ph.D. Indian Institute of Technology Bombay. Department of Electrical Engineering 1991 Availability: Items available for reference: Not for loan (1) Call number: 043:621.382:537.56 Cho.

Study of thin N2O gate oxides for MOS devices (R)

by Subrahmanyam, P.V.S [Author] | Vasi, J.M [Supervisor] | Indian Institute of Technology Bombay. Department of Electrical Engineering.

Language: English Publication details: Mumbai IIT 1999Dissertation note: Thesis Ph.D. Indian Institute of Technology Bombay. Department of Electrical Engineering 1999 Availability: Items available for reference: Not for loan (1) Call number: 043:621.382 Sub.

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