Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nano-materials and MEMS

Contributor(s): Wasa, Kiyotaka [Editor] | Kanno, Isaka [Editor] | Kotera, Hidetoshi [Editor]Language: English Publication details: Waltham William Andrew 2012Edition: 2ndDescription: xii, 644 p. 24 cmISBN: 978-1-4377-3483-6Subject(s): Electronics | Cathode sputtering(Plating process) -- Handbooks, manuals, etc | Thin films -- Handbooks, manuals, etc
List(s) this item appears in: Display List 03/12/2018-09/12/2018
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Item type Current library Call number Status Date due Barcode Item holds
Books Books Central Library, IITB
General Stacks 		621.382 Was(2) Available 243156
Total holds: 0

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