Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nano-materials and MEMS (Record no. 271957)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00841 a2200253 4500 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | OSt |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20221017100645.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 181105b xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 978-1-4377-3483-6 |
| 040 ## - CATALOGING SOURCE | |
| Transcribing agency | IITB |
| 041 ## - LANGUAGE CODE | |
| Language code of text/sound track or separate title | eng |
| 080 ## - UNIVERSAL DECIMAL CLASSIFICATION NUMBER | |
| Universal Decimal Classification number | 621.382 |
| Item number | Was(2) |
| 245 ## - TITLE STATEMENT | |
| Title | Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nano-materials and MEMS |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2nd |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Name of publisher, distributor, etc. | William Andrew |
| Date of publication, distribution, etc. | 2012 |
| Place of publication, distribution, etc. | Waltham |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xii, 644 p. |
| Dimensions | 24 cm |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Electronics |
| 9 (RLIN) | 1686 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Cathode sputtering(Plating process) |
| General subdivision | Handbooks, manuals, etc. |
| 9 (RLIN) | 2724 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Thin films |
| General subdivision | Handbooks, manuals, etc. |
| 9 (RLIN) | 2725 |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Wasa, Kiyotaka |
| Relator term | Editor |
| 9 (RLIN) | 2726 |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Kanno, Isaka |
| Relator term | Editor |
| 9 (RLIN) | 2727 |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Kotera, Hidetoshi |
| Relator term | Editor |
| 9 (RLIN) | 2728 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Source of classification or shelving scheme | |
| Koha item type | Books |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Home library | Current library | Shelving location | Date acquired | Source of acquisition | Cost, normal purchase price | Total Checkouts | Total Renewals | Full call number | Barcode | Date last seen | Date last checked out | Cost, replacement price | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Central Library, IITB | Central Library, IITB | General Stacks | 16/10/2018 | 5 | 7933.54 | 1 | 4 | 621.382 Was(2) | 243156 | 09/11/2023 | 16/06/2023 | 12396.15 | 16/10/2018 | Books |