Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nano-materials and MEMS
Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nano-materials and MEMS
- 2nd
- Waltham William Andrew 2012
- xii, 644 p. 24 cm
978-1-4377-3483-6
Electronics
Cathode sputtering(Plating process)--Handbooks, manuals, etc.
Thin films--Handbooks, manuals, etc.
621.382 / Was(2)
978-1-4377-3483-6
Electronics
Cathode sputtering(Plating process)--Handbooks, manuals, etc.
Thin films--Handbooks, manuals, etc.
621.382 / Was(2)