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		No cover image available Physics of submicron lithography by Valiev, Kamil A \| . Series: Edition: Language: English Publication details: ; New York : Plenum Press, 1992 ; 1992Availability: Items available for loan: 1 Call number: 621.372:621.382 Val. Place hold Add to cart (remove)
		No cover image available Methods and materials in microelectronic technology / edited by Joachim Bargon by \| . Series: Edition: Language: English Publication details: New York ; Plenum Press, ; 1984Availability: Items available for loan: 1 Call number: 621.372:621.382 Met. Place hold Add to cart (remove)
		No cover image available Excimer laser-liga : design and fabrication of hot embossing setup (R) by Ramkesh Meena \| Joshi, S.S. Series: Edition: Language: English Publication details: Mumbai ; IIT ; 2008Availability: Items available for reference: Not for loan (1) Call number: 043:621.9:621.375.9Ram. Add to cart (remove)
		No cover image available Design and development of micro-electrodeposition process for laser-LIGA (R) by Ahluwalia, Dheeraj \| Joshi, Suhas S. Series: Edition: Language: English Publication details: Mumbai ; IIT ; 2008Availability: Items available for reference: Not for loan (1) Call number: 043:621.9:621.357.7Ahl. Add to cart (remove)
		No cover image available Excimer laser-LIGA : numerical simulation of micro hot embossing progress (R) by Raut, Prashant B \| Joshi, S. S. and Singh, R. K. Series: Edition: Language: English Publication details: Mumbai ; IIT ; 2009Availability: Items available for reference: Not for loan (1) Call number: 043:621.9:621.375.9Rau. Add to cart (remove)
		No cover image available Process optimization on Raith-150 two E-beam lithography tool for sub-100nm CMOS device fabrication (R) by Ghosh, Kunal Promode \| Pinto, R. and Kottantharayil, Anil. Series: Edition: Language: English Publication details: Mumbai ; IIT ; 2010Availability: Items available for reference: Not for loan (1) Call number: 043:621.382.3Gho. Add to cart (remove)

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