Physics of submicron lithography

By: Valiev, Kamil AContributor(s): Language: English Series: Publication details: ; New York : Plenum Press, 1992 ; 1992Edition: Description: xi,493 p; 25 cmISBN: 0-306-43578-04Subject(s): | Lithography, Electron beam | X-ray lithography | Ion beam lithography | Physics
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Holdings
Item type Current library Call number Status Notes Date due Barcode Item holds
Books Books Central Library, IITB
621.372:621.382 Val Available G36A13 167132
Total holds: 0

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