Ultra clean processing of silicon surfaces : proceedings of the fourth international symposium on ultra clean processing of silicon surfaces (UCPSS'98), Ostend, Belgium, Sept. 21-23, 1998 / edited by Marc Heyns, Marc Meuris and Paul Mertens
Language: English Series: Publication details: ; Uetikon-Zuerich : Scitec Pub., 1999 ; 1999Edition: Description: xiv,301 p; 24 cmISBN: 3-908450-40-36Subject(s): | Ultrasonic cleaning-Congresses | Silicon-surfaces-Congresses| Item type | Current library | Call number | Status | Notes | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|
Books
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Central Library, IITB | 621.382 Int:4:98 | Available | G37A03 | 188410 |
Total holds: 0
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