Ultra clean processing of silicon surfaces : proceedings of the fourth international symposium on ultra clean processing of silicon surfaces (UCPSS'98), Ostend, Belgium, Sept. 21-23, 1998 / edited by Marc Heyns, Marc Meuris and Paul Mertens
International symposium on ultra clean processing of silicon
Ultra clean processing of silicon surfaces : proceedings of the fourth international symposium on ultra clean processing of silicon surfaces (UCPSS'98), Ostend, Belgium, Sept. 21-23, 1998 / edited by Marc Heyns, Marc Meuris and Paul Mertens - - Uetikon-Zuerich : Scitec Pub., 1999 1999 - xiv,301 p. 24 cm - .
3-908450-40-36
Ultrasonic cleaning-Congresses
Silicon-surfaces-Congresses
621.382 Int:4:98
Ultra clean processing of silicon surfaces : proceedings of the fourth international symposium on ultra clean processing of silicon surfaces (UCPSS'98), Ostend, Belgium, Sept. 21-23, 1998 / edited by Marc Heyns, Marc Meuris and Paul Mertens - - Uetikon-Zuerich : Scitec Pub., 1999 1999 - xiv,301 p. 24 cm - .
3-908450-40-36
Ultrasonic cleaning-Congresses
Silicon-surfaces-Congresses
621.382 Int:4:98