Simulation of the hot wire CVD process of Si:H thin film deposition (R)
Language: English Series: Publication details: Mumbai ; IIT ; 2004Edition: Description: vi,59 p; 30 cmISBN: Subject(s): Dusane, R.O. and Viswanathan, N.N | Theses and Dissertations | Thin films , Chemical vapour deposition , Silane| Item type | Current library | Call number | Status | Notes | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|
Theses and Dissertations
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Central Library, IITB | 043:669.782:539.23Din | Not for loan | D06B07 | 202455 |
Total holds: 0
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