Simulation of the hot wire CVD process of Si:H thin film deposition (R)
Dinesh Chandra
Simulation of the hot wire CVD process of Si:H thin film deposition (R) - - Mumbai IIT 2004 - vi,59 p. 30 cm - .
Dusane, R.O. and Viswanathan, N.N.
Theses and Dissertations
Thin films , Chemical vapour deposition , Silane
043:669.782:539.23Din
Simulation of the hot wire CVD process of Si:H thin film deposition (R) - - Mumbai IIT 2004 - vi,59 p. 30 cm - .
Dusane, R.O. and Viswanathan, N.N.
Theses and Dissertations
Thin films , Chemical vapour deposition , Silane
043:669.782:539.23Din