Development of low-k dielectric thin films for VLSI circuit applications (R)
Language: English Series: Publication details: Mumbai ; IIT ; 2003Edition: Description: v,48 p; 30 cmISBN: Subject(s): Dusane, Rajiv O | Theses and Dissertations | Silicon oxide films , Thin films , Integrated circuits-Very large scale integration| Item type | Current library | Call number | Status | Notes | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|
Theses and Dissertations
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Central Library, IITB | 043:621.372:621.382Sri | Not for loan | D06B07 | 199132 |
Total holds: 0
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