Development of low-k dielectric thin films for VLSI circuit applications (R)
Srivastava, Akhilesh Kumar
Development of low-k dielectric thin films for VLSI circuit applications (R) - - Mumbai IIT 2003 - v,48 p. 30 cm - .
Dusane, Rajiv O.
Theses and Dissertations
Silicon oxide films , Thin films , Integrated circuits-Very large scale integration
043:621.372:621.382Sri
Development of low-k dielectric thin films for VLSI circuit applications (R) - - Mumbai IIT 2003 - v,48 p. 30 cm - .
Dusane, Rajiv O.
Theses and Dissertations
Silicon oxide films , Thin films , Integrated circuits-Very large scale integration
043:621.372:621.382Sri