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Low temperature silicon nitride (Si3N4) by hot wire chemical vapor deposition (HWCVD) (R)

by Waghmare, Parag C | Rao, V. Ramgopal and Dusane, Rajiv O.

Series: Edition: Language: English Publication details: Mumbai ; IIT ; 2001Availability: Items available for reference: Not for loan (1) Call number: 043:621.315.6:621.793Wag.

Novel unit process development and their integration for sub-0.25 um MNSFET/MOSFET development (R)

by Rana, Amit Kumar | Rao, V. Ramgopal and Dusane, Rajiv O.

Series: Edition: Language: English Publication details: Mumbai ; IIT ; 2004Availability: Items available for reference: Not for loan (1) Call number: 043:621.382.3Ran.

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