Fabrication of piezoresistive device for MEMS application using poly silicon thin films obtained by aluminium induced crystallization (R)
Language: English Series: Publication details: Mumbai ; IIT ; 2012Edition: Description: ix,51 p; 30 cmISBN: Subject(s): Dusane, R.O | Theses and Dissertations | Polycrystalline semiconductors , Silicon crystals , Thin films devices| Item type | Current library | Call number | Status | Notes | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|
Theses and Dissertations
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Central Library, IITB | 043:621.793:539.23San | Not for loan | D06B14 | 231117 |
Total holds: 0
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