Fabrication of piezoresistive device for MEMS application using poly silicon thin films obtained by aluminium induced crystallization (R)
Sanagavarapu, Lavanya
Fabrication of piezoresistive device for MEMS application using poly silicon thin films obtained by aluminium induced crystallization (R) - - Mumbai IIT 2012 - ix,51 p. 30 cm - .
Dusane, R.O.
Theses and Dissertations
Polycrystalline semiconductors , Silicon crystals , Thin films devices
043:621.793:539.23San
Fabrication of piezoresistive device for MEMS application using poly silicon thin films obtained by aluminium induced crystallization (R) - - Mumbai IIT 2012 - ix,51 p. 30 cm - .
Dusane, R.O.
Theses and Dissertations
Polycrystalline semiconductors , Silicon crystals , Thin films devices
043:621.793:539.23San