Planar test structures for characterizing impurities in silicon

Contributor(s): Language: English Series: NBS SMT SP - 400 - 21 : 1976Publication details: Washington, D.C. ; NBS ; 1976Edition: Description: 32 p; ISBN: Subject(s): | MOS capacitors, PN junctions, Resistivity of silicon, Semiconductor devices, Semiconductor process controlOnline resources: Click here to access online
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Holdings
Item type Current library Call number Status Date due Barcode Item holds
Pamphlets Standards Reports Pamphlets Standards Reports Central Library, IITB
LNBS SMT SP - 400 - 21 : 1976 Not for loan A41084
Total holds: 0

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