Planar test structures for characterizing impurities in silicon
Planar test structures for characterizing impurities in silicon
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- Washington, D.C. NBS 1976
- 32 p.
- NBS SMT SP - 400 - 21 : 1976 .
MOS capacitors, PN junctions, Resistivity of silicon, Semiconductor devices, Semiconductor process control
LNBS SMT SP - 400 - 21 : 1976
MOS capacitors, PN junctions, Resistivity of silicon, Semiconductor devices, Semiconductor process control
LNBS SMT SP - 400 - 21 : 1976