HWCVD silicon nitride based microsensor (R)

By: Rokade, Harshal DContributor(s): Apte, P.R. and Dusane R.OLanguage: English Series: Publication details: Mumbai ; IIT ; 2005Edition: Description: v,46 p; 29 cmISBN: Subject(s): Apte, P.R. and Dusane R.O | Theses and Dissertations | Chemical vapour deposition , Micromachining , Silicon nitride , Atomic force microscopy
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Holdings
Item type Current library Call number Status Notes Date due Barcode Item holds
Theses and Dissertations Theses and Dissertations Central Library, IITB
043:621.317.3:621.793Rok Not for loan D06B21 208224
Total holds: 0

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