HWCVD silicon nitride based microsensor (R)
Rokade, Harshal D.
HWCVD silicon nitride based microsensor (R) - - Mumbai IIT 2005 - v,46 p. 29 cm - .
Apte, P.R. and Dusane R.O.
Theses and Dissertations
Chemical vapour deposition , Micromachining , Silicon nitride , Atomic force microscopy
043:621.317.3:621.793Rok
HWCVD silicon nitride based microsensor (R) - - Mumbai IIT 2005 - v,46 p. 29 cm - .
Apte, P.R. and Dusane R.O.
Theses and Dissertations
Chemical vapour deposition , Micromachining , Silicon nitride , Atomic force microscopy
043:621.317.3:621.793Rok