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CMOS cantilever sensor systems : atomic-force microscopy and gas sensing applications

by Lange, D | /Brand, O | Baltes, H | .

Series: Microtechnology and MEMSEdition: Language: English Publication details: Berlin ; Springer ; 2002Availability: Items available for loan: 1 Call number: 621.317.3:535.82Lan.

Piezotronics and piezo-phototronics

by Wang, Zhong Lin | .

Series: Microtechnology and MEMSEdition: Language: English Publication details: Berlin ; Springer ; 2012Availability: Not available: Checked out (1).

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