CMOS cantilever sensor systems : atomic-force microscopy and gas sensing applications

By: Lange, DContributor(s): /Brand, O | Baltes, H | Language: English Series: Microtechnology and MEMSPublication details: Berlin ; Springer ; 2002Edition: Description: viii,142 p; 24 cmISBN: 3-540-43143-8Subject(s): | Microelectromechanical systems-Design and construction , Gas detectors-Design and construction
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Holdings
Item type Current library Call number Status Notes Date due Barcode Item holds
Books Books Central Library, IITB
621.317.3:535.82Lan Available G35A01 205082
Total holds: 0

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