CMOS cantilever sensor systems : atomic-force microscopy and gas sensing applications
Language: English Series: Microtechnology and MEMSPublication details: Berlin ; Springer ; 2002Edition: Description: viii,142 p; 24 cmISBN: 3-540-43143-8Subject(s): | Microelectromechanical systems-Design and construction , Gas detectors-Design and constructionItem type | Current library | Call number | Status | Notes | Date due | Barcode | Item holds |
---|---|---|---|---|---|---|---|
Books | Central Library, IITB | 621.317.3:535.82Lan | Available | G35A01 | 205082 |
Total holds: 0
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