Photo assisted chemical vapor deposition of thin films of silicon nitride (R)

By: Suresh, K.BContributor(s): Kulkarni, A.R. and Srinivasa, R.SLanguage: English Series: Publication details: Bombay ; IIT ; 1990Edition: Description: 110 p; 28 cmISBN: 0Subject(s): Kulkarni, A.R. and Srinivasa, R.S | Theses and Dissertations | Thin films | Silicon nitride | Vapor-plating
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Holdings
Item type Current library Call number Status Notes Date due Barcode Item holds
Theses and Dissertations Theses and Dissertations Central Library, IITB
043:621.793:539.23Sur Not for loan D06A21 155429
Total holds: 0

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