Photo assisted chemical vapor deposition of thin films of silicon nitride (R)

Suresh, K.B.

Photo assisted chemical vapor deposition of thin films of silicon nitride (R) - - Bombay IIT 1990 - 110 p. 28 cm - .

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Kulkarni, A.R. and Srinivasa, R.S.
Theses and Dissertations
Thin films
Silicon nitride
Vapor-plating

043:621.793:539.23Sur

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