Sputtered hafnium dioxide as high-k dielectric for sub 100nm MOSFETs (R)

By: Satish MeenaContributor(s): Pinto, RLanguage: English Series: Publication details: Mumbai ; IIT ; 2009Edition: Description: v,34 p; 30 cmISBN: Subject(s): Pinto, R | Theses and Dissertations | Metal oxide semiconductor field-effect Transistors , Dielectrics
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Holdings
Item type Current library Call number Status Notes Date due Barcode Item holds
Theses and Dissertations Theses and Dissertations Central Library, IITB
043:621.382.3:537.226Sat Not for loan D03B28 224495
Total holds: 0

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