HWCVD silicon nitride based microsensor (R)
Language: English Series: Publication details: Mumbai ; IIT ; 2005Edition: Description: v,46 p; 29 cmISBN: Subject(s): Apte, P.R. and Dusane R.O | Theses and Dissertations | Chemical vapour deposition , Micromachining , Silicon nitride , Atomic force microscopyItem type | Current library | Call number | Status | Notes | Date due | Barcode | Item holds |
---|---|---|---|---|---|---|---|
Theses and Dissertations | Central Library, IITB | 043:621.317.3:621.793Rok | Not for loan | D06B21 | 208224 |
Total holds: 0
There are no comments on this title.