Making hotwire CVD a viable technology alternative for bioMEMS applications : device optimization, fabrication and characterization (R)

By: Kale, Nitin S [Author]Contributor(s): Ramgopal Rao, V [Supervisor] | Indian Institute of Technology Bombay. Department of Electrical Engineering 2008Language: English Publication details: Bombay ; IIT ; 2008Description: xiii,162 p; 30 cmSubject(s): Ramgopal Rao, V | Theses and Dissertations | Microfabrication | Biosensors | Chemical vapor deposition | Microelectromechanical systemsDissertation note: Thesis Ph.D Indian Institute of Technology Bombay. Department of Electrical Engineering 2008
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Holdings
Item type Current library Call number Status Notes Date due Barcode Item holds
Theses and Dissertations Theses and Dissertations Central Library, IITB
Pamphlet Section (Theses, Standards, Reports)
043:621.382:621.793 Kal Not for loan D08A27 216637
Total holds: 0

Thesis Ph.D Indian Institute of Technology Bombay. Department of Electrical Engineering 2008

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