Making hotwire CVD a viable technology alternative for bioMEMS applications : device optimization, fabrication and characterization (R)
Kale, Nitin S.
Making hotwire CVD a viable technology alternative for bioMEMS applications : device optimization, fabrication and characterization (R) - Bombay IIT 2008 - xiii,162 p. 30 cm
Thesis
Ramgopal Rao, V.
Theses and Dissertations
Microfabrication
Biosensors
Chemical vapor deposition
Microelectromechanical systems
043:621.382:621.793 / Kal
Making hotwire CVD a viable technology alternative for bioMEMS applications : device optimization, fabrication and characterization (R) - Bombay IIT 2008 - xiii,162 p. 30 cm
Thesis
Ramgopal Rao, V.
Theses and Dissertations
Microfabrication
Biosensors
Chemical vapor deposition
Microelectromechanical systems
043:621.382:621.793 / Kal