Laser and particle-beam chemical processing for microelectronics : symposium, Boston, Massachusetts, U.S.A., Dec. 1-3, 1987 / edited by Daniel J. Ehrlich, Gregg S. Higashi and Modest M. Oprysko
Language: English Series: Publication details: Pittsburgh ; Materials Research Society, ; 1988Edition: Description: xvii,509 p; 22.5 cmISBN: 0-931837-69-31Subject(s): | Lasers-Congresses | Chemical processes-Congresses | Particle beams-Congresses| Item type | Current library | Call number | Status | Notes | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|
Books
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Central Library, IITB | 621.375.9:621.382 Las:87 | Available | C14A08 | 151895 |
Total holds: 0
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