Laser and particle-beam chemical processing for microelectronics : symposium, Boston, Massachusetts, U.S.A., Dec. 1-3, 1987 / edited by Daniel J. Ehrlich, Gregg S. Higashi and Modest M. Oprysko
Laser and particle-beam chemical processing for microelectronics : symposium, Boston, Massachusetts, U.S.A., Dec. 1-3, 1987 / edited by Daniel J. Ehrlich, Gregg S. Higashi and Modest M. Oprysko - - Pittsburgh Materials Research Society, 1988 - xvii,509 p. 22.5 cm - .
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