Plasma properties, deposition and etching / edited by J.J. Pouch and S.A. Alterovitz
Language: English Series: Publication details: ; Aedermannsdorf : Trans Tech Pub., 1993 ; 1993Edition: Description: x,742 p; 24.5 cmISBN: 0-87849-670-X12Subject(s): | Plasma etching | Plasma chemistry| Item type | Current library | Call number | Status | Notes | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|
Books
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Central Library, IITB | 537.56:620.183 Pla | Available | G20A17 | 173043 |
Total holds: 0
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