Plasma properties, deposition and etching / edited by J.J. Pouch and S.A. Alterovitz
Plasma properties, deposition and etching / edited by J.J. Pouch and S.A. Alterovitz - - Aedermannsdorf : Trans Tech Pub., 1993 1993 - x,742 p. 24.5 cm - .
0-87849-670-X12
Plasma etching
Plasma chemistry
537.56:620.183 Pla