SiO2 in Si microdevices

By: Itsumi, ManabuContributor(s): Language: English Series: Springer series in material science ; v.56Publication details: Tokyo ; Kodansha/Springer-Verlag ; 2002Edition: Description: xiii,322 p; 24 cmISBN: 4-06-210667-1Subject(s): |
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Holdings
Item type Current library Call number Status Notes Date due Barcode Item holds
Books Books Central Library, IITB
621.382:669.782Its(2) Available G37A21 205080
Total holds: 0

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