SiO2 in Si microdevices
Itsumi, Manabu
SiO2 in Si microdevices - - Tokyo Kodansha/Springer-Verlag 2002 - xiii,322 p. 24 cm - Springer series in material science ; v.56 .
4-06-210667-1
621.382:669.782Its(2)
SiO2 in Si microdevices - - Tokyo Kodansha/Springer-Verlag 2002 - xiii,322 p. 24 cm - Springer series in material science ; v.56 .
4-06-210667-1
621.382:669.782Its(2)