Microelectronics test pattern NBS-3 for evaluting the resistivity- dopant density relationship of silicon
Language: English Series: NBS SMT SP - 400 - 22 : 1976Publication details: Washington, D.C. ; National Bureau of standards ; 1976Edition: Description: 49 p; ISBN: Subject(s): | Dopant density, Microelectronics, MOS capacitor, n-p-n transistor fabrication, p-n juncationOnline resources: Click here to access onlineItem type | Current library | Call number | Status | Date due | Barcode | Item holds |
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Pamphlets Standards Reports | Central Library, IITB | LNBS SMT SP - 400 - 22 : 1976 | Not for loan | A41085 |
Total holds: 0
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