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Microelectronics test pattern NBS-3 for evaluting the resistivity- dopant density relationship of silicon

Microelectronics test pattern NBS-3 for evaluting the resistivity- dopant density relationship of silicon - - Washington, D.C. National Bureau of standards 1976 - 49 p. - NBS SMT SP - 400 - 22 : 1976 .

ISBN:

Subjects--Topical Terms:

Dopant density, Microelectronics, MOS capacitor, n-p-n transistor fabrication, p-n juncation

Universal Decimal Class. No.: LNBS SMT SP - 400 - 22 : 1976

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