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Physics of submicron lithography

Valiev, Kamil A.

Physics of submicron lithography - - New York : Plenum Press, 1992 1992 - xi,493 p. 25 cm - .

ISBN: 0-306-43578-04

Subjects--Topical Terms:

Lithography, Electron beam
X-ray lithography
Ion beam lithography
Physics

Universal Decimal Class. No.: 621.372:621.382 Val

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