Curvature measurement and stresses in electronic devices due to strained silicon nitride layer (R)
Language: English Series: Publication details: Mumbai ; IIT ; 2013Edition: Description: vii,76 p; 30 cmISBN: Subject(s): Pant, Prita and Dusane, R.O | Theses and Dissertations | Silicon nitride coatings , Strains and stresses-Measurement , Curvature-MeasurementItem type | Current library | Call number | Status | Notes | Date due | Barcode | Item holds |
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Theses and Dissertations | Central Library, IITB | 043:669.782:621.382Bha | Not for loan | D06B16 | 233669 |
Total holds: 0
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