Curvature measurement and stresses in electronic devices due to strained silicon nitride layer (R)
Bharani, Rahil
Curvature measurement and stresses in electronic devices due to strained silicon nitride layer (R) - - Mumbai IIT 2013 - vii,76 p. 30 cm - .
Pant, Prita and Dusane, R.O.
Theses and Dissertations
Silicon nitride coatings , Strains and stresses-Measurement , Curvature-Measurement
043:669.782:621.382Bha
Curvature measurement and stresses in electronic devices due to strained silicon nitride layer (R) - - Mumbai IIT 2013 - vii,76 p. 30 cm - .
Pant, Prita and Dusane, R.O.
Theses and Dissertations
Silicon nitride coatings , Strains and stresses-Measurement , Curvature-Measurement
043:669.782:621.382Bha