Study of hydrogenated amorphous silicon carbon (a-SiC:H) alloy film deposited by hot wire chemical vapor deposition (HWCVD) (R)
Language: English Series: Publication details: Mumbai ; IIT ; 2006Edition: Description: viii,120 p; 28 cmISBN: Subject(s): Dusane, Rajiv O | Theses and Dissertations | Chemical vapour deposition , Silicon alloysItem type | Current library | Call number | Status | Notes | Date due | Barcode | Item holds |
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Theses and Dissertations | Central Library, IITB | 043:669.782:621.793Swa | Not for loan | D10A08 | 210004 |
Total holds: 0
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