Study of hydrogenated amorphous silicon carbon (a-SiC:H) alloy film deposited by hot wire chemical vapor deposition (HWCVD) (R)

Swain, Bibhu Prasad

Study of hydrogenated amorphous silicon carbon (a-SiC:H) alloy film deposited by hot wire chemical vapor deposition (HWCVD) (R) - - Mumbai IIT 2006 - viii,120 p. 28 cm - .




Dusane, Rajiv O.
Theses and Dissertations
Chemical vapour deposition , Silicon alloys

043:669.782:621.793Swa

Powered by Koha