Study of hydrogenated amorphous silicon carbon (a-SiC:H) alloy film deposited by hot wire chemical vapor deposition (HWCVD) (R)
Swain, Bibhu Prasad
Study of hydrogenated amorphous silicon carbon (a-SiC:H) alloy film deposited by hot wire chemical vapor deposition (HWCVD) (R) - - Mumbai IIT 2006 - viii,120 p. 28 cm - .
Dusane, Rajiv O.
Theses and Dissertations
Chemical vapour deposition , Silicon alloys
043:669.782:621.793Swa
Study of hydrogenated amorphous silicon carbon (a-SiC:H) alloy film deposited by hot wire chemical vapor deposition (HWCVD) (R) - - Mumbai IIT 2006 - viii,120 p. 28 cm - .
Dusane, Rajiv O.
Theses and Dissertations
Chemical vapour deposition , Silicon alloys
043:669.782:621.793Swa