Development of low dielectric constant thin film for VLSI applications (R)
Language: English Series: Publication details: Mumbai ; IIT ; 2006Edition: Description: x,127 p; 30 cmISBN: Subject(s): Dusane, Rajiv O | Theses and Dissertations | Copper , Dielectrics , Thin films , Integrated circuits-Very large scale integration| Item type | Current library | Call number | Status | Notes | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|
Theses and Dissertations
|
Central Library, IITB | 043:621.372:621.382Sin | Not for loan | D10A08 | 208963 |
Total holds: 0
There are no comments on this title.