Development of low dielectric constant thin film for VLSI applications (R)
Singh, Sunil Kumar
Development of low dielectric constant thin film for VLSI applications (R) - - Mumbai IIT 2006 - x,127 p. 30 cm - .
Dusane, Rajiv O.
Theses and Dissertations
Copper , Dielectrics , Thin films , Integrated circuits-Very large scale integration
043:621.372:621.382Sin
Development of low dielectric constant thin film for VLSI applications (R) - - Mumbai IIT 2006 - x,127 p. 30 cm - .
Dusane, Rajiv O.
Theses and Dissertations
Copper , Dielectrics , Thin films , Integrated circuits-Very large scale integration
043:621.372:621.382Sin