Synthesis and characterization of spin-coated low-k HSQ films (R)
Language: English Series: Publication details: Mumbai ; IIT ; 2004Edition: Description: v,37 p; 30 cmISBN: Subject(s): Dusane, Rajiv O | Theses and Dissertations | Thin films , Hydrogen-Silsesquioxane , Silicon devices , Dielectric devices| Item type | Current library | Call number | Status | Notes | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|
Theses and Dissertations
|
Central Library, IITB | 043:669.782:539.23Kot | Not for loan | D06B07 | 202454 |
Total holds: 0
There are no comments on this title.