Synthesis and characterization of spin-coated low-k HSQ films (R)
Kothari, Mayur
Synthesis and characterization of spin-coated low-k HSQ films (R) - - Mumbai IIT 2004 - v,37 p. 30 cm - .
Dusane, Rajiv O.
Theses and Dissertations
Thin films , Hydrogen-Silsesquioxane , Silicon devices , Dielectric devices
043:669.782:539.23Kot
Synthesis and characterization of spin-coated low-k HSQ films (R) - - Mumbai IIT 2004 - v,37 p. 30 cm - .
Dusane, Rajiv O.
Theses and Dissertations
Thin films , Hydrogen-Silsesquioxane , Silicon devices , Dielectric devices
043:669.782:539.23Kot