Principles of plasma discharges and materials processing
Lieberman, Michael A.
Principles of plasma discharges and materials processing - 2nd ed - Hoboken John Wiley 2005 - xxxv,757 24 cm - .
978-0-471-72001-0
Physics
Plasma dynamics , Plasma etching , Thin films-Surfaces , Plasma chemistry-Industrial applications
537.56Lie(2)
Principles of plasma discharges and materials processing - 2nd ed - Hoboken John Wiley 2005 - xxxv,757 24 cm - .
978-0-471-72001-0
Physics
Plasma dynamics , Plasma etching , Thin films-Surfaces , Plasma chemistry-Industrial applications
537.56Lie(2)