Sputtering materials for VLSI and thin film devices
Sarkar, Jaydeep
Sputtering materials for VLSI and thin film devices - Walthem William Andrew 2013 - x,603 p. 24 cm
978-0-8155-1593-7
Electrical Engineering
Microelectronics--Materials
Cathode sputtering(Plating process)--Materials
Integrated circuits--Very large scale integration--Materials
Thin film devices--Materials
Flat panel displays--Materials
Sputtering(Physics)
621.382:539.23 / Sar
Sputtering materials for VLSI and thin film devices - Walthem William Andrew 2013 - x,603 p. 24 cm
978-0-8155-1593-7
Electrical Engineering
Microelectronics--Materials
Cathode sputtering(Plating process)--Materials
Integrated circuits--Very large scale integration--Materials
Thin film devices--Materials
Flat panel displays--Materials
Sputtering(Physics)
621.382:539.23 / Sar