Sputtering materials for VLSI and thin film devices
Language: English Publication details: Walthem William Andrew 2013Description: x,603 p. 24 cmISBN: 978-0-8155-1593-7Subject(s): Electrical Engineering | Microelectronics -- Materials | Cathode sputtering(Plating process) -- Materials | Integrated circuits -- Very large scale integration -- Materials | Thin film devices -- Materials | Flat panel displays -- Materials | Sputtering(Physics)| Item type | Current library | Call number | Status | Date due | Barcode | Item holds |
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Books
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Central Library, IITB General Stacks | 621.382:539.23 Sar | Available | 243155 |
Total holds: 0
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