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Thin film reference materials development final redport for CRADA CN-1364

Thin film reference materials development final redport for CRADA CN-1364 - - Gaithersburg National Institute of Standard and Technology 1998 - 42 p. 28 cm - NIST SP 400 - 100 : 1998 .

ISBN:

Subjects--Topical Terms:

Calibration, Ellipsometry, Metrology, Reference materials, Silicon dioxide

Universal Decimal Class. No.: LNIST SP 400 - 100 : 1998

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