Antireflecting-Chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems (SRM)
Antireflecting-Chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems (SRM)
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- Gaithersburg National Institute of Standards and Technology 1997
- 35 p. 28 cm
- NIST SP 260 - 129 : 1997 .
LNIST SP 260 - 129 : 1997
LNIST SP 260 - 129 : 1997