| 000 | 00494 a2200253 4500 | ||
|---|---|---|---|
| 001 | 75185 | ||
| 020 | _a3-527-29295-08 | ||
| 041 | _aeng | ||
| 080 | _a621.793 CVD | ||
| 245 | _aCVD of nonmetals / edited by William S. Rees | ||
| 250 | _a | ||
| 260 | _a | ||
| 260 | _bWeinheim : VCH, 1996 | ||
| 260 | _c1996 | ||
| 300 | _axvi,424 p. | ||
| 300 | _c24.5 cm | ||
| 490 | _a | ||
| 100 | _a | ||
| 700 | _a | ||
| 650 | _a | ||
| 650 | _aChemical vapor deposition | ||
| 942 | _cBK | ||
| 942 | _2UDC | ||
| 999 |
_c83848 _d83849 |
||